RF MEMS miniature-switched capacitors with pull-down and pull-up electrodes for high power applications

This paper presents miniature RF MEMS switched capacitors with pull-down and pull-up electrodes for increased capacitance ratio and power handling. A 2×2 switch array has three operation states: up-state, down-state and up-up state (switch attached to the pull-up electrode), with capacitances of 115...

Full description

Saved in:
Bibliographic Details
Published in2011 IEEE MTT-S International Microwave Symposium pp. 1 - 4
Main Authors Sedaghat-Pisheh, H., Mahameed, R., Rebeiz, G. M.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.06.2011
Subjects
Area measurement
Coplanar waveguides
Microelectromechanical systems (MEMS) devices
Micromechanical devices
microwave switches
Radio frequency
RF MEMS
Switches
Thickness measurement
Online AccessGet full text

Cover

More Information
Summary:This paper presents miniature RF MEMS switched capacitors with pull-down and pull-up electrodes for increased capacitance ratio and power handling. A 2×2 switch array has three operation states: up-state, down-state and up-up state (switch attached to the pull-up electrode), with capacitances of 115 fF, 370 fF and 64 fF, respectively. The pull-up electrode increases the capacitance ratio from 3.2 (standard operation with no pull-up electrode) to 5.8. The pull-up electrode also solves the problem of RF self actuation and the 2×2 switch was tested up to 4 W at 5 GHz (pull-up electrode engaged) with no change in the measured S-parameters.
ISBN:1612847544
9781612847542
ISSN:0149-645X
2576-7216
DOI:10.1109/MWSYM.2011.5972915