Application of the digital holographic interference microscope for thin films investigation

We used the digital holographic interference microscope (DHIM) for thin films investigation. Three-dimensional (3-D) image of A1N thin film deposited on an acryl substrate by vacuum-arc method .and the results of the film thickness measurement are presented. It has been shown that the DHIM can be su...

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Bibliographic Details
Published in2007 International Workshop on Optoelectronic Physics and Technology pp. 70 - 71
Main Authors Tishko, D.N., Tishko, T.V., Titar, V.P., Zadneprovskiy, Yu.A., Kuprin, A.S., Zgoda, I.V.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.06.2007
Subjects
Coatings
Holographic optical components
Holography
Interference
Optical films
Optical microscopy
Production
Substrates
Thickness measurement
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Summary:We used the digital holographic interference microscope (DHIM) for thin films investigation. Three-dimensional (3-D) image of A1N thin film deposited on an acryl substrate by vacuum-arc method .and the results of the film thickness measurement are presented. It has been shown that the DHIM can be successfully used for film surface quality control, thickness and film damages parameters measurement.
ISBN:9781424413218
1424413214
DOI:10.1109/OPT.2007.4298545