Design of self-sustained CMOS amplifiers for all-CMOS MEMS based oscillators

In this paper we will discuss the CMOS circuit design strategies and main results for an all-CMOS MEMS based oscillator in order to reduce the oscillator far-to-carrier noise (which is limited by the circuit noise) and the close-to-carrier noise (which is limited by both the amplifier phase noise an...

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Bibliographic Details
Published in2016 IEEE International Conference on Electronics, Circuits and Systems (ICECS) pp. 752 - 755
Main Authors Uranga, A., Sobreviela, G., Riverola, M., Torres, F., Barniol, N.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.12.2016
Subjects
CMOS technology
CMOS-MEMS
Gain
MEMS-Based Oscillators
Micromechanical devices
Noise
Phase noise
Power demand
Resonant frequency
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Summary:In this paper we will discuss the CMOS circuit design strategies and main results for an all-CMOS MEMS based oscillator in order to reduce the oscillator far-to-carrier noise (which is limited by the circuit noise) and the close-to-carrier noise (which is limited by both the amplifier phase noise and the MEMS quality factor). The feasibility of using the Via layer of a commercial CMOS technology to design a monolithical integrated CMOS-MEMS oscillator will be demonstrated.
DOI:10.1109/ICECS.2016.7841311