Multiple breakdown phenomena and modeling for non-uniform dielectric systems

We report a wide range of experimental observations of multiple breakdown (BD) phenomena in BEOL/FEOL/MOL dielectric systems with large variability (non-uniformity). Newly developed successive breakdown theory of time-dependent clustering model can well capture these multiple BD events with and with...

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Bibliographic Details
Published in2014 IEEE International Electron Devices Meeting pp. 34.7.1 - 34.7.4
Main Authors Wu, Ernest, Baozhen Li, Stathis, James H., Achanta, Ravi
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.12.2014
Subjects
Correlation
Data models
Dielectrics
Electric breakdown
Mathematical model
Reliability
Stress
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Summary:We report a wide range of experimental observations of multiple breakdown (BD) phenomena in BEOL/FEOL/MOL dielectric systems with large variability (non-uniformity). Newly developed successive breakdown theory of time-dependent clustering model can well capture these multiple BD events with and without correlation. The understanding of these effects can potentially lead to much improved and realistic projection for future technology nodes.
ISSN:0163-1918
2156-017X
DOI:10.1109/IEDM.2014.7047171