Influence of deteriorated i-line filter on image quality of exposure tools, and its improvement

We studied the influence of deterioration of i-line filter on image quality, and the method of replacing i-line filter to improve illuminance without influence on process conditions.

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Bibliographic Details
Published in2008 International Symposium on Semiconductor Manufacturing (ISSM) pp. 175 - 176
Main Author Okuyama, Kazunori
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.10.2008
Subjects
Image quality
Optical distortion
Optical filters
Optical imaging
Resists
Shape
Throughput
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Summary:We studied the influence of deterioration of i-line filter on image quality, and the method of replacing i-line filter to improve illuminance without influence on process conditions.
ISSN:1523-553X