Reliability investigations on the programming currents of 28nm metal e-Fuse

The reliability performance of 28nm metal e-Fuse programmed with different current is investigated. High temperature stress (HTS) or temperature cycling (TC) may cause the shift of metal-e-fuse element resistance and shape. In this paper, we find that 28nm metal e-Fuse programming with low current r...

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Bibliographic Details
Published in2017 China Semiconductor Technology International Conference (CSTIC) pp. 1 - 3
Main Authors Guangyan Zhao, Yong Zhao, Chien, Wei-Ting Kary
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.03.2017
Subjects
28nm metal e-Fuse
Anodes
Cathodes
Fuses
High K dielectric materials
Metals
Programming
programming current
Reliability
resistance stability
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Summary:The reliability performance of 28nm metal e-Fuse programmed with different current is investigated. High temperature stress (HTS) or temperature cycling (TC) may cause the shift of metal-e-fuse element resistance and shape. In this paper, we find that 28nm metal e-Fuse programming with low current reliability performance is more stable than metal e-Fuse programming with high current; Resistance shift was only observed on fuses programmed in the over-programmed mode. In addition, the SEM profile of metal e-Fuse programming with low current is obviously better than high current SEM profile.
DOI:10.1109/CSTIC.2017.7919737