A high sensitivity alcohol gas sensor based on TiO2 thin films

In this paper, the alcohol gas sensors based on TiO 2 thin films deposited by DC magnetron sputtering were fabricated. The effect of annealing temperature on the sensitivity of the samples was invested by varying the annealing temperature from 250°C to 550°C. The surface morphology and crystal orien...

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Bibliographic Details
Published in2015 China Semiconductor Technology International Conference pp. 1 - 3
Main Authors Zhang Hanxia, Wei Wanli, Zhang Kailiang, Wang Fang, Yuan Yujie, Yang Zhengchun, Zhang Tiantian, Sun Shijiu
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.03.2015
Subjects
Annealing
Atomic layer deposition
Measurement
Temperature sensors
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Summary:In this paper, the alcohol gas sensors based on TiO 2 thin films deposited by DC magnetron sputtering were fabricated. The effect of annealing temperature on the sensitivity of the samples was invested by varying the annealing temperature from 250°C to 550°C. The surface morphology and crystal orientation were characterized by Atomic Force Microscope (AFM) and X-ray diffraction (XRD). It was found that the sensitivity of the sample annealed at 450°C was higher than that of other samples.
ISSN:2158-2297
2158-2297
DOI:10.1109/CSTIC.2015.7153478