A high sensitivity alcohol gas sensor based on TiO2 thin films
In this paper, the alcohol gas sensors based on TiO 2 thin films deposited by DC magnetron sputtering were fabricated. The effect of annealing temperature on the sensitivity of the samples was invested by varying the annealing temperature from 250°C to 550°C. The surface morphology and crystal orien...
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Published in | 2015 China Semiconductor Technology International Conference pp. 1 - 3 |
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Main Authors | , , , , , , , |
Format | Conference Proceeding |
Language | English |
Published |
IEEE
01.03.2015
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Subjects | |
Online Access | Get full text |
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Summary: | In this paper, the alcohol gas sensors based on TiO 2 thin films deposited by DC magnetron sputtering were fabricated. The effect of annealing temperature on the sensitivity of the samples was invested by varying the annealing temperature from 250°C to 550°C. The surface morphology and crystal orientation were characterized by Atomic Force Microscope (AFM) and X-ray diffraction (XRD). It was found that the sensitivity of the sample annealed at 450°C was higher than that of other samples. |
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ISSN: | 2158-2297 2158-2297 |
DOI: | 10.1109/CSTIC.2015.7153478 |