A novel method to fabricate AlN-Al2O3 multiphase ceramic layer on WCu alloy
A novel approach for the fabrication of α-Al 2 O 3 , mullite (Al 6 Si 2 O 13 ) and AlN multiphase ceramic layer on WCu via sintering process accompanied with mixing PCS/AlN composite slurry by ball milling was described. The sintering process parameters such as water vapor content and raw material r...
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Published in | 2014 15th International Conference on Electronic Packaging Technology pp. 155 - 158 |
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Main Authors | , , , , |
Format | Conference Proceeding |
Language | English |
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01.05.2014
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Abstract | A novel approach for the fabrication of α-Al 2 O 3 , mullite (Al 6 Si 2 O 13 ) and AlN multiphase ceramic layer on WCu via sintering process accompanied with mixing PCS/AlN composite slurry by ball milling was described. The sintering process parameters such as water vapor content and raw material ratio were mainly studied in this paper which greatly affected the formation of ceramic layers. At last, the interfacial reaction was also discussed between ceramic layer and WCu substrate. |
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AbstractList | A novel approach for the fabrication of α-Al 2 O 3 , mullite (Al 6 Si 2 O 13 ) and AlN multiphase ceramic layer on WCu via sintering process accompanied with mixing PCS/AlN composite slurry by ball milling was described. The sintering process parameters such as water vapor content and raw material ratio were mainly studied in this paper which greatly affected the formation of ceramic layers. At last, the interfacial reaction was also discussed between ceramic layer and WCu substrate. |
Author | Rong An Guangwu Wen Chunqing Wang Jiandong Zhu Yanhong Tian |
Author_xml | – sequence: 1 surname: Jiandong Zhu fullname: Jiandong Zhu organization: State Key Lab. of Adv. Welding & Joining, Harbin Inst. of Technol., Harbin, China – sequence: 2 surname: Rong An fullname: Rong An organization: State Key Lab. of Adv. Welding & Joining, Harbin Inst. of Technol., Harbin, China – sequence: 3 surname: Chunqing Wang fullname: Chunqing Wang email: wangcq@hit.edu.cn organization: State Key Lab. of Adv. Welding & Joining, Harbin Inst. of Technol., Harbin, China – sequence: 4 surname: Yanhong Tian fullname: Yanhong Tian organization: State Key Lab. of Adv. Welding & Joining, Harbin Inst. of Technol., Harbin, China – sequence: 5 surname: Guangwu Wen fullname: Guangwu Wen organization: Sch. of Mater. Sci. & Eng., Harbin Inst. of Technol., Harbin, China |
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Snippet | A novel approach for the fabrication of α-Al 2 O 3 , mullite (Al 6 Si 2 O 13 ) and AlN multiphase ceramic layer on WCu via sintering process accompanied with... |
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StartPage | 155 |
SubjectTerms | Ceramics III-V semiconductor materials Metals mullite multiphase ceramic layer Nitrogen PCS/AlN composite slurry power semiconductor Substrates Thermal conductivity |
Title | A novel method to fabricate AlN-Al2O3 multiphase ceramic layer on WCu alloy |
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