A novel method to fabricate AlN-Al2O3 multiphase ceramic layer on WCu alloy

A novel approach for the fabrication of α-Al 2 O 3 , mullite (Al 6 Si 2 O 13 ) and AlN multiphase ceramic layer on WCu via sintering process accompanied with mixing PCS/AlN composite slurry by ball milling was described. The sintering process parameters such as water vapor content and raw material r...

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Bibliographic Details
Published in2014 15th International Conference on Electronic Packaging Technology pp. 155 - 158
Main Authors Jiandong Zhu, Rong An, Chunqing Wang, Yanhong Tian, Guangwu Wen
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.05.2014
Subjects
Ceramics
III-V semiconductor materials
Metals
mullite
multiphase ceramic layer
Nitrogen
PCS/AlN composite slurry
power semiconductor
Substrates
Thermal conductivity
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Summary:A novel approach for the fabrication of α-Al 2 O 3 , mullite (Al 6 Si 2 O 13 ) and AlN multiphase ceramic layer on WCu via sintering process accompanied with mixing PCS/AlN composite slurry by ball milling was described. The sintering process parameters such as water vapor content and raw material ratio were mainly studied in this paper which greatly affected the formation of ceramic layers. At last, the interfacial reaction was also discussed between ceramic layer and WCu substrate.
DOI:10.1109/ICEPT.2014.6922626