A MEMS sensor for low-frequency vibration energy harvesting

• Published in: 2012 Microsystems for Measurement and Instrumentation (MAMNA) pp. 1 - 4
• Main Authors: Moses, M. S., Wester, B. A., Brown, C. Y., Kutzer, M. D., Kucher, P. R., Rebello, K. J.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 01.03.2012
• Subjects: Capacitance; electrostatic devices; Electrostatics; Energy harvesting; Fingers; Micromechanical devices; Resonant frequency; vibration measurement; Vibrations

This paper reports ongoing work in development of a MEMS electrostatic sensor for self-powered detection of mechanical vibrations of less than 1000 Hz. The sensor is an in-plane overlapping comb configuration. Six different variants on a common design were fabricated on a single die using the commer...