A MEMS sensor for low-frequency vibration energy harvesting

This paper reports ongoing work in development of a MEMS electrostatic sensor for self-powered detection of mechanical vibrations of less than 1000 Hz. The sensor is an in-plane overlapping comb configuration. Six different variants on a common design were fabricated on a single die using the commer...

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Bibliographic Details
Published in2012 Microsystems for Measurement and Instrumentation (MAMNA) pp. 1 - 4
Main Authors Moses, M. S., Wester, B. A., Brown, C. Y., Kutzer, M. D., Kucher, P. R., Rebello, K. J.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.03.2012
Subjects
Capacitance
electrostatic devices
Electrostatics
Energy harvesting
Fingers
Micromechanical devices
Resonant frequency
vibration measurement
Vibrations
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Summary:This paper reports ongoing work in development of a MEMS electrostatic sensor for self-powered detection of mechanical vibrations of less than 1000 Hz. The sensor is an in-plane overlapping comb configuration. Six different variants on a common design were fabricated on a single die using the commercial SOI-MUMPS process. Additional masses were manually added to lower the resonant frequency.
ISBN:9781467317818
1467317810
DOI:10.1109/MAMNA.2012.6195098