Design of a hybrid closed loop control system for a MEMS accelerometer using backstepping principle

This paper presents a novel hybrid control algorithm for the conventional capacitive MEMS accelerometer. This scheme is realized by adding a backstepping controller to a conventional PID closed loop system to achieve higher stability and higher dynamic range and to prevent pull-in phenomena by preve...

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Bibliographic Details
Published in2007 Internatonal Conference on Microelectronics pp. 213 - 216
Main Authors Payam, A.F., Hassani, F.A., Fathipour, M.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.12.2007
Subjects
Accelerometers
Backstepping
backstepping controller
closed loop control
Closed loop systems
Control systems
Displacement control
Dynamic range
MEMS accelerometer
Micromechanical devices
Performance analysis
PID controller
Stability
Three-term control
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Summary:This paper presents a novel hybrid control algorithm for the conventional capacitive MEMS accelerometer. This scheme is realized by adding a backstepping controller to a conventional PID closed loop system to achieve higher stability and higher dynamic range and to prevent pull-in phenomena by preventing linger displacement from passing a maximum preset value. The analysis of convergence and resolution show that while the proposed control scheme satisfies these criteria it also keeps resolution performance better than what is normally obtained in conventional PID controllers. The performance of the proposed hybrid controller investigated here is validated by computer simulation.
ISBN:1424418461
9781424418466
ISSN:2159-1660
DOI:10.1109/ICM.2007.4497696