Implantable Neural Probe System for Patterned Photostimulation and Electrophysiology Recording

We demonstrate a system for implantable nanophotonic neural probes with custom packaging and peripherals. The probes, which were manufactured on 200mm Si wafers, monolithically integrate SiN waveguides with TiN electrophysiology electrodes and were tested in vivo.

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Bibliographic Details
Published in2022 Conference on Lasers and Electro-Optics (CLEO) pp. 1 - 2
Main Authors Chen, Fu-Der, Wahn, Hannes, Xue, Tianyuan, Jung, Youngho, Straguzzi, John N., Azadeh, Saeed S., Stalmashonak, Andrei, Chua, Hongyao, Luo, Xianshu, Shah, Prajay, Chameh, Homeira Moradi, Lo, Patrick Guo-Qiang, Valiante, Taufik A., Sacher, Wesley D., Poon, Joyce K. S.
Format Conference Proceeding
LanguageEnglish
Published OSA 01.05.2022
Subjects
Electrodes
In vivo
Lasers and electrooptics
Packaging
Silicon
Tin
Waveguide lasers
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Summary:We demonstrate a system for implantable nanophotonic neural probes with custom packaging and peripherals. The probes, which were manufactured on 200mm Si wafers, monolithically integrate SiN waveguides with TiN electrophysiology electrodes and were tested in vivo.