Implantable Neural Probe System for Patterned Photostimulation and Electrophysiology Recording
We demonstrate a system for implantable nanophotonic neural probes with custom packaging and peripherals. The probes, which were manufactured on 200mm Si wafers, monolithically integrate SiN waveguides with TiN electrophysiology electrodes and were tested in vivo.
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Published in | 2022 Conference on Lasers and Electro-Optics (CLEO) pp. 1 - 2 |
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Main Authors | , , , , , , , , , , , , , , |
Format | Conference Proceeding |
Language | English |
Published |
OSA
01.05.2022
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Subjects | |
Online Access | Get full text |
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Summary: | We demonstrate a system for implantable nanophotonic neural probes with custom packaging and peripherals. The probes, which were manufactured on 200mm Si wafers, monolithically integrate SiN waveguides with TiN electrophysiology electrodes and were tested in vivo. |
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