Nonlinear compensation method with bang-bang compensator for a high precision stage using synchronous piezoelectric device driver

• Published in: 2010 11th IEEE International Workshop on Advanced Motion Control (AMC) pp. 1 - 6
• Main Authors: Tsuruta, Kazuhiro, Sato, Kazuya, Sawada, Sunao, Kosaka, Kouji
• Format: Conference Proceeding
• Language: English
• Published: IEEE 01.03.2010
• Subjects: Counting circuits; Delay; Force control; Frequency; Friction; Machine tools; Motion control; Piezoelectric devices; Sliding mode control; Synchronous motors

The need for high precision and a fast response time in positioning tables in the machine tool and semiconductor fields has grown. To achieve such requirements, a synchronous piezoelectric device driver to control the stage has been proposed. The stage is driven by the scratching force of this devic...