Nonlinear compensation method with bang-bang compensator for a high precision stage using synchronous piezoelectric device driver

The need for high precision and a fast response time in positioning tables in the machine tool and semiconductor fields has grown. To achieve such requirements, a synchronous piezoelectric device driver to control the stage has been proposed. The stage is driven by the scratching force of this devic...

Full description

Saved in:
Bibliographic Details
Published in2010 11th IEEE International Workshop on Advanced Motion Control (AMC) pp. 1 - 6
Main Authors Tsuruta, Kazuhiro, Sato, Kazuya, Sawada, Sunao, Kosaka, Kouji
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.03.2010
Subjects
Counting circuits
Delay
Force control
Frequency
Friction
Machine tools
Motion control
Piezoelectric devices
Sliding mode control
Synchronous motors
Online AccessGet full text

Cover

More Information
Summary:The need for high precision and a fast response time in positioning tables in the machine tool and semiconductor fields has grown. To achieve such requirements, a synchronous piezoelectric device driver to control the stage has been proposed. The stage is driven by the scratching force of this device, but the control performance was shown to be affected by the nonlinear friction force. Thus, a friction compensation method which was based on PID+FF control with sliding mode compensator was proposed for a high precision stage control [1]. In this paper, we propose an alternative compensation method, consisting of the conventional method with a bang-bang friction compensator. Experimental results are given to show the effectiveness of our proposed method. Using our new method, the high frequency fluctuation phenomena in the control input becomes smaller than in the conventional method.
ISBN:1424466687
9781424466689
ISSN:1943-6572
1943-6580
DOI:10.1109/AMC.2010.5464111