System Configuration and Fabrication Technology for Distributed MEMS

The system configuration and printing-based fabrication technology of distributed MEMS are discussed using our research trials related to those aspects. Based on the concept of autonomous distributed system (ADS), we have constructed and operated a smart conveyer using micro nozzle arrays. We also a...

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Bibliographic Details
Published in2010 First Workshop on Hardware and Software Implementation and Control of Distributed MEMS pp. 1 - 5
Main Authors Fujita, H, Ataka, M
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.06.2010
Subjects
Actuators
autonoous distributed system
component
Control systems
Distributed control
Fabrication
flexibile display
MEMS
micro actuator
Microactuators
Micromechanical devices
Printing
Robotics and automation
Sensor arrays
Silicon
smart surface
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Summary:The system configuration and printing-based fabrication technology of distributed MEMS are discussed using our research trials related to those aspects. Based on the concept of autonomous distributed system (ADS), we have constructed and operated a smart conveyer using micro nozzle arrays. We also applied printing technology to fabricate a kind of distributed MEMS, i.e. a flexible display consisting of movable Fabry-Perot interferometers.
ISBN:1424472229
9781424472222
DOI:10.1109/dMEMS.2010.23