HCI vs. BTI? - Neither one's out

In the development of MOSFETs first `Hot Carrier Injection' (HCI) played an important role for reliability aspects [1,2]. With new shrinked process generations and nitrided gate oxides additionally the `Bias Temperature Instability' (BTI) raised and became the most critical mechanism. Some...

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Published in2012 IEEE International Reliability Physics Symposium (IRPS) pp. 2F.4.1 - 2F.4.6
Main Authors Schlunder, C., Aresu, S., Georgakos, G., Kanert, W., Reisinger, H., Hofmann, K., Gustin, W.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.04.2012
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Abstract In the development of MOSFETs first `Hot Carrier Injection' (HCI) played an important role for reliability aspects [1,2]. With new shrinked process generations and nitrided gate oxides additionally the `Bias Temperature Instability' (BTI) raised and became the most critical mechanism. Some publications even claim that HCI is negligible in main-stream applications [3-6]. But is this statement generally true or is it the result of a partial view? This paper will discuss the area of conflict regarding the importance of N/PBTI and HCI. Some typical examples will illuminate different fields of applications with one dominating damage mechanism. Specific characteristics of these circuits and operation conditions leading to an outbalance of HCI or Negative-/Positive-BTI will be carved out. Finally it will be evaluated if a general trend is observable.
AbstractList In the development of MOSFETs first `Hot Carrier Injection' (HCI) played an important role for reliability aspects [1,2]. With new shrinked process generations and nitrided gate oxides additionally the `Bias Temperature Instability' (BTI) raised and became the most critical mechanism. Some publications even claim that HCI is negligible in main-stream applications [3-6]. But is this statement generally true or is it the result of a partial view? This paper will discuss the area of conflict regarding the importance of N/PBTI and HCI. Some typical examples will illuminate different fields of applications with one dominating damage mechanism. Specific characteristics of these circuits and operation conditions leading to an outbalance of HCI or Negative-/Positive-BTI will be carved out. Finally it will be evaluated if a general trend is observable.
Author Gustin, W.
Kanert, W.
Hofmann, K.
Aresu, S.
Georgakos, G.
Schlunder, C.
Reisinger, H.
Author_xml – sequence: 1
  givenname: C.
  surname: Schlunder
  fullname: Schlunder, C.
  email: christian.schluender@infineon.com
  organization: Corp. Reliability Dept., Infineon Technol. AG, Neubiberg, Germany
– sequence: 2
  givenname: S.
  surname: Aresu
  fullname: Aresu, S.
  organization: Corp. Reliability Dept., Infineon Technol. AG, Neubiberg, Germany
– sequence: 3
  givenname: G.
  surname: Georgakos
  fullname: Georgakos, G.
  organization: Design Enabling & Services Dept., Infineon Technol. AG, Neubiberg, Germany
– sequence: 4
  givenname: W.
  surname: Kanert
  fullname: Kanert, W.
  organization: Automotive Quality Excellence Dept., Infineon Technol. AG, Neubiberg, Germany
– sequence: 5
  givenname: H.
  surname: Reisinger
  fullname: Reisinger, H.
  organization: Corp. Reliability Dept., Infineon Technol. AG, Neubiberg, Germany
– sequence: 6
  givenname: K.
  surname: Hofmann
  fullname: Hofmann, K.
  organization: Adv. Technol. Manage. Dept., Infineon Technol. AG, Neubiberg, Germany
– sequence: 7
  givenname: W.
  surname: Gustin
  fullname: Gustin, W.
  organization: Corp. Reliability Dept., Infineon Technol. AG, Neubiberg, Germany
BookMark eNo9j01Lw0AURUetYFv7A8TN7FxNfG--3sxKbFAbKCqahbuSJm8woq00UfDfG7B4N3dx4FzuRIw22w0LcYaQIUK8LJ4enzMNqDOvLVKkAzFB64jQB8BDMcZogsIQ8egfUHgZDcBZVATan4hZ173BEAqorRkLucgL-d1lcl4WV1LJe277V97JYfqik9uv_lQcp-q949m-p6K8vSnzhVo-3BX59VK1EXqloalDsMkCcTDriJwwMBkdCdAF79DYiLWvEjjgep2s9dT4xjUOmxTZTMX5n7Zl5tXnrv2odj-r_VHzC9rcQII
ContentType Conference Proceeding
DBID 6IE
6IH
CBEJK
RIE
RIO
DOI 10.1109/IRPS.2012.6241797
DatabaseName IEEE Electronic Library (IEL) Conference Proceedings
IEEE Proceedings Order Plan (POP) 1998-present by volume
IEEE Xplore All Conference Proceedings
IEEE Xplore
IEEE Proceedings Order Plans (POP) 1998-present
DatabaseTitleList
Database_xml – sequence: 1
  dbid: RIE
  name: IEEE Xplore
  url: https://proxy.k.utb.cz/login?url=https://ieeexplore.ieee.org/
  sourceTypes: Publisher
DeliveryMethod fulltext_linktorsrc
Discipline Engineering
EISBN 1457716801
9781457716799
9781457716805
1457716798
EISSN 1938-1891
EndPage 2F.4.6
ExternalDocumentID 6241797
Genre orig-research
GroupedDBID 29I
6IE
6IF
6IH
6IL
6IN
ABLEC
ADZIZ
AI.
ALMA_UNASSIGNED_HOLDINGS
BEFXN
BFFAM
BGNUA
BKEBE
BPEOZ
CBEJK
CHZPO
IEGSK
IJVOP
OCL
RIE
RIL
RIO
VH1
ID FETCH-LOGICAL-i90t-20dc884f407e83b91ef18e7329701586513491c6af050ecbf4467d6d5d51df9e3
IEDL.DBID RIE
ISBN 145771678X
9781457716782
ISSN 1541-7026
IngestDate Wed Jun 26 19:24:04 EDT 2024
IsPeerReviewed false
IsScholarly true
Language English
LinkModel DirectLink
MergedId FETCHMERGED-LOGICAL-i90t-20dc884f407e83b91ef18e7329701586513491c6af050ecbf4467d6d5d51df9e3
ParticipantIDs ieee_primary_6241797
PublicationCentury 2000
PublicationDate 2012-April
PublicationDateYYYYMMDD 2012-04-01
PublicationDate_xml – month: 04
  year: 2012
  text: 2012-April
PublicationDecade 2010
PublicationTitle 2012 IEEE International Reliability Physics Symposium (IRPS)
PublicationTitleAbbrev IRPS
PublicationYear 2012
Publisher IEEE
Publisher_xml – name: IEEE
SSID ssj0000781243
ssj0020386
Score 2.0254993
Snippet In the development of MOSFETs first `Hot Carrier Injection' (HCI) played an important role for reliability aspects [1,2]. With new shrinked process generations...
SourceID ieee
SourceType Publisher
StartPage 2F.4.1
SubjectTerms Degradation
Hot carriers
Human computer interaction
Logic gates
MOSFETs
Reliability
Stress
Title HCI vs. BTI? - Neither one's out
URI https://ieeexplore.ieee.org/document/6241797
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwjV07T8MwED61nWDh0SLe8oDEgtO8bU9IVKAWiaqCInWrYvssIaQWtQkDvx47ScNDDGxJFucS-e6-833fAVyEWqjYZIJKTCW1GbiiXGSKZlJYf-nrSGLZ5TtOh8_x_SyZteCq4cIgYtl8hp67LM_y9VIVrlTWT0M3L4u1oc2EqLhaTT3FidaEceOFQz8qpzzaDCGgzAKNktSVMAsPGJ9ttJ7q-7A-7gx80R89Tp5cx1fo1av9GLtSRp27HXjYvG_VbPLqFbn01McvKcf_GrQLvS9-H5k0kWsPWrjYh-1v0oRdIMPBiLyvPXIzHV0TSsboyBsrslzg5Zosi7wH07vb6WBI62kK9EX4ud0NWnEeGwvgkEdSBGgCjiwKBbMZAU8Tp1MYqDQzfuKjksbiRKZTnegk0EZgdACdhV3jEEigfGNhm05idBUkixGlUm5vS2Gsx5BH0HWmzt8qvYx5beXx349PYMt97qob5hQ6-arAMxvoc3le_uFP-YycjA
link.rule.ids 310,311,783,787,792,793,799,27937,55086
linkProvider IEEE
linkToHtml http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwjV1LS8NAEB5qPagXH634dg-CFzfmnd2TYLEk2paiEXor2ReI0EqbePDXu5uk8YEHb0kum0nYmflm5_sG4MIVlPsqo5jJkGGdgXNMaMZxxqj2l7bwmCy7fEdh_OzfT4JJC64aLoyUsmw-k5a5LM_yxZwXplR2HbpmXla0Bus6ryZhxdZqKipGtsb1Gz_s2l4551HnCA6ONNQoaV1BpAFCRCYrtaf63q0PPB2bXieP4yfT8-Va9Xo_Bq-Ucae_DcPVG1ftJq9WkTOLf_wSc_yvSTvQ_WL4oXETu3ahJWd7sPVNnLADKO4l6H1pods0uUEYjaShbyzQfCYvl2he5F1I-3dpL8b1PAX8Qu1c7wfBCfGVhnCSeIw6UjlERp5LI50TkDAwSoUODzNlB7bkTGmkGIlQBCJwhKLS24f2TK9xAMjhttLATQS-NDUkjRIZ52Z3M6q0z2CH0DGmTt8qxYxpbeXR34_PYSNOh4PpIBk9HMOm-fRVb8wJtPNFIU912M_ZWfm3PwFqJJ_X
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.genre=proceeding&rft.title=2012+IEEE+International+Reliability+Physics+Symposium+%28IRPS%29&rft.atitle=HCI+vs.+BTI%3F+-+Neither+one%27s+out&rft.au=Schlunder%2C+C.&rft.au=Aresu%2C+S.&rft.au=Georgakos%2C+G.&rft.au=Kanert%2C+W.&rft.date=2012-04-01&rft.pub=IEEE&rft.isbn=9781457716782&rft.issn=1541-7026&rft.eissn=1938-1891&rft.spage=2F.4.1&rft.epage=2F.4.6&rft_id=info:doi/10.1109%2FIRPS.2012.6241797&rft.externalDocID=6241797
thumbnail_l http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=1541-7026&client=summon
thumbnail_m http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=1541-7026&client=summon
thumbnail_s http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=1541-7026&client=summon