Development of software for optimization of operating mode at product processing by scanned electron beam
On the basis of the PENELOPE-2008 transport code, a software for modeling the interaction of a scanned electron beam with an object moving via the irradiation zone has been developed. The SW takes into account the spatial radiant distribution of the particles depending on the form of the beam scan a...
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Published in | 2014 20th International Workshop on Beam Dynamics and Optimization (BDO) pp. 1 - 2 |
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Main Authors | , , , , , , |
Format | Conference Proceeding |
Language | English |
Published |
IEEE
01.06.2014
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Subjects | |
Online Access | Get full text |
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Summary: | On the basis of the PENELOPE-2008 transport code, a software for modeling the interaction of a scanned electron beam with an object moving via the irradiation zone has been developed. The SW takes into account the spatial radiant distribution of the particles depending on the form of the beam scan and its spectrum. It is shown, that proper selection of the scan form provides a reduction of the dose uniformity ratio within the processed object. |
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ISBN: | 9781479953196 1479953199 |
DOI: | 10.1109/BDO.2014.6890011 |