Problem and solution of designing an air bearing system

In this paper, we present the structure and design of an air bearing stage. First, a spherical air bearing system (SABS) is introduced in the alignment of nano-imprinting. Secondly, the eddy current is used to control the SABS over-coming the frictionless motion. Thirdly, an adaptive algorithm is de...

Full description

Saved in:
Bibliographic Details
Published in2010 2nd International Conference on Industrial and Information Systems Vol. 1; pp. 212 - 215
Main Authors Kok Kiong Tan, Sunan Huang
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.07.2010
Subjects
adaptive control
Air bearing systems
Damping
eddy current damping
Magnetic devices
Magnetic levitation
Magnetomechanical effects
nano-imprinting
Performance evaluation
Online AccessGet full text

Cover

More Information
Summary:In this paper, we present the structure and design of an air bearing stage. First, a spherical air bearing system (SABS) is introduced in the alignment of nano-imprinting. Secondly, the eddy current is used to control the SABS over-coming the frictionless motion. Thirdly, an adaptive algorithm is designed for estimating the unknown model parameters. Finally, an experimental platform is setup and the proposed algorithm is tested.
ISBN:9781424478606
142447860X
DOI:10.1109/INDUSIS.2010.5565873