Image processing plume fluence for superconducting thin-film depositions

Process control is a crucial element in all deposition techniques. It is especially elusive in the versatile and efficient deposition technique known as pulsed-laser-deposition (PLD). Image processed emissions from the plume of a YBa/sub 2/Cu/sub 3/O/sub 7-x/ (YBCO) target are monitored in situ to d...

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Published inProceedings of the Second International Conference on Intelligent Processing and Manufacturing of Materials. IPMM'99 (Cat. No.99EX296) Vol. 2; pp. 1317 - 1320 vol.2
Main Authors Jones, J.G., Biggers, R.R., Busbee, J.D., Dempsey, D.V., Kozlowski, G.
Format Conference Proceeding
LanguageEnglish
Published IEEE 1999
Subjects
Image processing
Logic
Sputtering
Superconducting thin films
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Summary:Process control is a crucial element in all deposition techniques. It is especially elusive in the versatile and efficient deposition technique known as pulsed-laser-deposition (PLD). Image processed emissions from the plume of a YBa/sub 2/Cu/sub 3/O/sub 7-x/ (YBCO) target are monitored in situ to determine two dimensional spatial information about the plume. Manual and fuzzy-logic based regulation of laser energy based on this plume emission feedback resulted in improved film quality and repeatability of the PLD thin-film depositions. Imaging of the plume under various deposition conditions, both with and without process control, will help to improve understanding of the effect of changing environmental conditions on the plume characteristics.
ISBN:9780780354890
0780354893
DOI:10.1109/IPMM.1999.791562