Erratum to "Thin-Film Silicon MEMS for Dynamic Mass Sensing in Vacuum and Air: Phase Noise, Allan Deviation, Mass Sensitivity and Limits of Detection"

• Published in: Journal of microelectromechanical systems Vol. 33; no. 3; pp. 403 - 404
• Main Authors: Pinto, Rui M. R., Brito, Pedro, Chu, Virginia, Conde, Joao Pedro
• Format: Journal Article
• Language: English
• Published: New York IEEE 01.06.2024; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: 1/f noise; Error detection; Microelectromechanical systems; Micromechanical devices; Noise prediction; Noise sensitivity; Phase noise; Root mean square; Sensitivity; Sensors; Thin films
• ISSN: 1057-7157; 1941-0158
• DOI: 10.1109/JMEMS.2024.3375930

In the above article <xref ref-type="bibr" rid="ref1">[1] , which consists in the application of phase noise theory for the prediction of MEMS mass limit of detection, an error was found in <xref rid="deqn10" ref-type="disp-formula">Eq. (10) . The error resulted in the overestimation of the frequency resolution <inline-formula> <tex-math notation="LaTeX">\left(\Delta f_{\min }\right) </tex-math></inline-formula> and the limit of detection <inline-formula> <tex-math notation="LaTeX">(LoD) </tex-math></inline-formula>. A few other typos were also detected and we take the opportunity to correct them here, for the benefit of the reader. The errata follows below: