In Situ Measurement and Analysis of Low Pressure Gas Concentration Distribution Using 70-dB SNR 1,000 Frame-Per-Second Absorption Imaging System

We are developing a 70-dB SNR 1,000 frame-per-second absorption imaging system, and it enables us to visualize gas concentration distribution and its dynamic behavior in a chamber for semiconductor manufacturing. In the steady-state gas flow condition, the spectrometry of NO 2 gas shows a good linea...

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Bibliographic Details
Published in2022 International Symposium on Semiconductor Manufacturing (ISSM) pp. 1 - 4
Main Authors Sakai, Yushi, Shiba, Yoshinobu, Inada, Takafumi, Goto, Tetsuya, Suwa, Tomoyuki, Sutoh, Akihito, Morimoto, Tatsuo, Shirai, Yasuyuki, Sugawa, Shigetoshi, Oikawa, Tetsu, Hamaya, Aoi, Kuroda, Rihito
Format Conference Proceeding
LanguageEnglish
Published IEEE 12.12.2022
Subjects
Absorption
Absorption imaging
CMOS image sensor
gas concentration monitoring
Gases
global shutter
Imaging
in situ
Semiconductor device manufacture
Semiconductor device measurement
semiconductor manufacturing
SNR
Spectroscopy
Visualization
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Summary:We are developing a 70-dB SNR 1,000 frame-per-second absorption imaging system, and it enables us to visualize gas concentration distribution and its dynamic behavior in a chamber for semiconductor manufacturing. In the steady-state gas flow condition, the spectrometry of NO 2 gas shows a good linear relationship between the absorbance and the partial pressure above approximately 0.1 Pa with the system. Such low partial pressure measurement enables the visualization of beginning of jet out of \text{NO}_{2}/\text{Ar} mixed gases from a nozzle. Furthermore, 1,000 frame-per-second imaging enables analyses of the gas velocity distribution and its width.
DOI:10.1109/ISSM55802.2022.10027064