Uniform Electron Emission from \text} Tunneling Diode Arrays under Rough Vacuum
Uniform electron emission (EE) under rough vacuum of \sim 10^{-2} Pa from on-chip micro-emitter arrays based on \text{SiO}_{\mathrm{x}} tunneling diodes (STDs) in electroformed \text{SiO}_{\mathrm{x}} is reported. Here, we provide a unique means to visually resolve the spatial distribution of EE fro...
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| Published in | 2023 24th International Vacuum Electronics Conference (IVEC) pp. 1 - 2 |
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| Main Authors | , |
| Format | Conference Proceeding |
| Language | English |
| Published |
IEEE
25.04.2023
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| Subjects | |
| Online Access | Get full text |
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| Abstract | Uniform electron emission (EE) under rough vacuum of \sim 10^{-2} Pa from on-chip micro-emitter arrays based on \text{SiO}_{\mathrm{x}} tunneling diodes (STDs) in electroformed \text{SiO}_{\mathrm{x}} is reported. Here, we provide a unique means to visually resolve the spatial distribution of EE from STD arrays and emitter-to-emitter uniformity at the microscale resolution via accompanied light emission. Benefiting from good emitter-to-emitter uniformity and low pressure sensitivity of EE from STD arrays, improved emission performances is obtained. |
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| AbstractList | Uniform electron emission (EE) under rough vacuum of \sim 10^{-2} Pa from on-chip micro-emitter arrays based on \text{SiO}_{\mathrm{x}} tunneling diodes (STDs) in electroformed \text{SiO}_{\mathrm{x}} is reported. Here, we provide a unique means to visually resolve the spatial distribution of EE from STD arrays and emitter-to-emitter uniformity at the microscale resolution via accompanied light emission. Benefiting from good emitter-to-emitter uniformity and low pressure sensitivity of EE from STD arrays, improved emission performances is obtained. |
| Author | Zhan, Fangyuan Wei, Xianlong |
| Author_xml | – sequence: 1 givenname: Fangyuan surname: Zhan fullname: Zhan, Fangyuan email: zhanfangy@163.com organization: School of Electronics, Peking University,Key Laboratory for the Physics and Chemistry of Nanodevices,Beijing,China – sequence: 2 givenname: Xianlong surname: Wei fullname: Wei, Xianlong email: weixl@pku.edu.cn organization: School of Electronics, Peking University,Key Laboratory for the Physics and Chemistry of Nanodevices,Beijing,China |
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| Snippet | Uniform electron emission (EE) under rough vacuum of \sim 10^{-2} Pa from on-chip micro-emitter arrays based on \text{SiO}_{\mathrm{x}} tunneling diodes (STDs)... |
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| SubjectTerms | Electron emission Graphical models low pressure sensitivity micro-emitter array on-chipelectron source Sensitivity Spatial resolution System-on-chip Tunneling tunneling diode uniform emission Vacuum electronics |
| Title | Uniform Electron Emission from \text} Tunneling Diode Arrays under Rough Vacuum |
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