Uniform Electron Emission from \text} Tunneling Diode Arrays under Rough Vacuum

Uniform electron emission (EE) under rough vacuum of \sim 10^{-2} Pa from on-chip micro-emitter arrays based on \text{SiO}_{\mathrm{x}} tunneling diodes (STDs) in electroformed \text{SiO}_{\mathrm{x}} is reported. Here, we provide a unique means to visually resolve the spatial distribution of EE fro...

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Bibliographic Details
Published in2023 24th International Vacuum Electronics Conference (IVEC) pp. 1 - 2
Main Authors Zhan, Fangyuan, Wei, Xianlong
Format Conference Proceeding
LanguageEnglish
Published IEEE 25.04.2023
Subjects
Electron emission
Graphical models
low pressure sensitivity
micro-emitter array
on-chipelectron source
Sensitivity
Spatial resolution
System-on-chip
Tunneling
tunneling diode
uniform emission
Vacuum electronics
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Summary:Uniform electron emission (EE) under rough vacuum of \sim 10^{-2} Pa from on-chip micro-emitter arrays based on \text{SiO}_{\mathrm{x}} tunneling diodes (STDs) in electroformed \text{SiO}_{\mathrm{x}} is reported. Here, we provide a unique means to visually resolve the spatial distribution of EE from STD arrays and emitter-to-emitter uniformity at the microscale resolution via accompanied light emission. Benefiting from good emitter-to-emitter uniformity and low pressure sensitivity of EE from STD arrays, improved emission performances is obtained.
DOI:10.1109/IVEC56627.2023.10157240