0.0062\ ^/\sqrt Angle Random Walk and 0.027\ ^/hr Bias Instability from a Micro-Shell Resonator Gyroscope with Surface Electrodes

• Published in: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) pp. 737 - 740
• Main Authors: Singh, Sajal, Woo, Jong-Kwan, He, Guohong, Cho, Jae Yoong, Najafi, Khalil
• Format: Conference Proceeding
• Language: English
• Published: IEEE 01.01.2020
• Subjects: Angle Random Walk; Bias Stability; Fused Silica; Precision Shell Integrating Gyroscope; Quality Factor; Resonant Gyro; Surface Electrode; Wine Glass Gyroscope
• ISSN: 2160-1968
• DOI: 10.1109/MEMS46641.2020.9056391

This paper reports measured results for a fused-silica precision shell integrating (PSI) micro gyroscope employing out-of-plane drive/sense transduction mechanism. The PSI gyroscope is made with a 5 mm radius shell resonator operating in n=2 wine-glass mode at a frequency ( f_{n=2} ) of 5.803 kHz with as-fabricated frequency split ( \Delta f ) of 2.1 Hz. Large and reasonably uniform capacitance (∼0.25 pF) is achieved with flat surface electrodes. The gyroscope is operated in the force-rebalance mode by interfacing with an ultra-low-noise transimpedance amplifier (TIA). Near-navigation grade angle random walk (ARW) of 0.0062\ \deg/\sqrt{\mathrm{h}}\mathrm{r} , in-run bias instability (BI) of 0.027 deg/hr and scale factor of 158 mV/deg/s without any temperature compensation are achieved.