High-resolution transmission electron microscopic investigations of molybdenum thin films on faceted α-Al2O3

• Published in: Journal of applied crystallography Vol. 38; no. 2; pp. 260 - 265
• Main Authors: Wiehl, Leonore, Oster, Jens, Huth, Michael
• Format: Journal Article
• Language: English
• Published: 5 Abbey Square, Chester, Cheshire CH1 2HU, England International Union of Crystallography 01.04.2005; Blackwell
• Subjects: Condensed matter: structure, mechanical and thermal properties; corundum; Electron, ion, and scanning probe microscopy; Elemental solids; Exact sciences and technology; high-resolution transmission electron microscopy; Physics; Structure of solids and liquids; crystallography; Structure of specific crystalline solids; thin film; Transmission, reflection and scanning electron microscopy(including ebic); Atomic force microscopy; Inorganic compounds; Epitaxial layers; Crystal orientation; Crystal growth from vapors; Experimental study; Molybdenum; Faceting; Thin films; Unit cell; Transmission electron microscopy; BCC lattices; Transition elements; Molecular beam epitaxy
• ISSN: 1600-5767; 0021-8898; 1600-5767
• DOI: 10.1107/S0021889804033126

Epitaxially grown Mo films on a faceted corundum (α‐Al2O3) m plane were investigated by transmission electron microscopy. Low‐ and high‐resolution images were taken from a cross‐section specimen cut perpendicular to the facets. It was possible to identify unambiguously the crystallographic orientation of these facets and explain the considerable deviation (∼10°) of the experimental interfacet angle, as measured with atomic force microscopy (AFM), from the expected value. For the first time, proof is given for a smooth facet and a curvy facet with orientation near to . Moreover, the three‐dimensional epitaxial relationship of an Mo film on a faceted corundum m surface was determined.