Path to silicon photonics commercialization: 25 Gb/s platform development in a CMOS manufacturing foundry line

Silicon photonics platform in a commercial 0.18 µm CMOS foundry line is described. Low-loss Si passives and high speed germanium photodetectors (>20GHz) with low dark current (∼11nA) and high responsivity (1.06A/W) at 1550nm are presented.

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Bibliographic Details
Published inOFC 2014 pp. 1 - 3
Main Authors Lim, Andy Eu-Jin, Tsung-Yang Liow, Junfeng Song, Chao Li, Fang, Qing, Xiaoguang Tu, Ning Duan, Kok Kiong Chen, Tern, Roger Poh Cher, Chuan Peng, Bong Woong Mun, Islam, Mohd Nurul, Jae Soo Park, Subbu, Chivukula, Guo-Qiang Lo
Format Conference Proceeding
LanguageEnglish
Published OSA 01.03.2014
Subjects
CMOS integrated circuits
Dark current
Optical fibers
Silicon photonics
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Summary:Silicon photonics platform in a commercial 0.18 µm CMOS foundry line is described. Low-loss Si passives and high speed germanium photodetectors (>20GHz) with low dark current (∼11nA) and high responsivity (1.06A/W) at 1550nm are presented.
DOI:10.1364/OFC.2014.Th2A.51