Well-ordered nanopore arrays in rutile TiO2 single crystals by swift heavy ion-beam lithography

Ion track lithography has been applied for transferring the self-ordered nanopattern of porous anodic alumina to single-crystalline rutile TiO2 substrates. As a result, nanometre resolved arrays have been fabricated with an aspect ratio ranging from 5 to 16, over areas of several square millimetres....

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Bibliographic Details
Published inNanotechnology Vol. 18; no. 30; pp. 305303 - 305303 (6)
Main Authors Sanz, R, Jensen, J, Johansson, A, Skupinski, M, Possnert, G, Boman, M, Hernandez-Vélez, M, Vazquez, M, Hjort, K
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.08.2007
Subjects
Fysik
NATURAL SCIENCES
NATURVETENSKAP
Physics
TECHNOLOGY
TEKNIKVETENSKAP
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Summary:Ion track lithography has been applied for transferring the self-ordered nanopattern of porous anodic alumina to single-crystalline rutile TiO2 substrates. As a result, nanometre resolved arrays have been fabricated with an aspect ratio ranging from 5 to 16, over areas of several square millimetres. Differences in the expected aspect ratio of the resulting nanopores in rutile TiO2 single crystals are analysed and discussed. Some of these differences may be ascribed to varying densities of the mask material.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0957-4484
1361-6528
1361-6528
DOI:10.1088/0957-4484/18/30/305303