Shape Measurement Based on Combined Reduced Phase Dual-Directional Illumination Digital Holography and Speckle Displacements
We present a dual-directional illumination digital holographic method to increase height range measurement with a reduced phase ambiguity. Small change in the illumination angle of incident introduce phase difference between the recorded complex fields. We decrease relative phase difference between...
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Published in | 2018 Progress in Electromagnetics Research Symposium (PIERS Toyama) pp. 184 - 189 |
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Main Authors | , |
Format | Conference Proceeding |
Language | English |
Published |
The Institute of Electronics, Information and Communication Engineers (IEICE)
01.08.2018
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Series | Progress in Electromagnetics Research Symposium |
Subjects | |
Online Access | Get full text |
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Summary: | We present a dual-directional illumination digital holographic method to increase height range measurement with a reduced phase ambiguity. Small change in the illumination angle of incident introduce phase difference between the recorded complex fields. We decrease relative phase difference between the recorded complex field 279 and 139 times by changing the angle of incident 0.5° and 1°, respectively. A two cent Euro coin edge groove is used to measure the shape. The groove depth is measured as \approx 300\mu \mathrm{m} . Further, numerical re-focusing and analysis of speckle displacements in two different planes are used to measure the depth without a use of phase unwrapping process. |
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ISBN: | 9781538654552 1538654555 4885523168 9784885523168 |
ISSN: | 1559-9450 |
DOI: | 10.23919/PIERS.2018.8597821 |