Fabrication of MgB2 Nanowire Single-Photon Detector with Meander Structure

We report the fabrication of a MgB 2 nanowire single-photon detector (SSPD or SNSPD) with a meander structure and its optical response. In-situ passivation of AlN is quite effective for both protecting the MgB 2 surface from oxidation and from damage during the Ar ion milling process. Meander patter...

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Bibliographic Details
Published inApplied physics express Vol. 6; no. 2; pp. 023101 - 023101-3
Main Authors Shibata, Hiroyuki, Akazaki, Tatsushi, Tokura, Yasuhiro
Format Journal Article
LanguageEnglish
Published The Japan Society of Applied Physics 01.02.2013
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Summary:We report the fabrication of a MgB 2 nanowire single-photon detector (SSPD or SNSPD) with a meander structure and its optical response. In-situ passivation of AlN is quite effective for both protecting the MgB 2 surface from oxidation and from damage during the Ar ion milling process. Meander patterns of $10\times 10$ μm 2 with the line widths between 225 to 135 nm are obtained without degradation. The meander with the line width of 135 nm exhibits the capacity for detecting single photons at $\lambda = 1550$ nm.
Bibliography:Cross-sectional TEM image and EDF spectra of 20-nm-thick MgB 2 film passivated by 15-nm-thick AlN. (a) Scanning electron micrograph, (b) enlarged view, (c) atomic force microscopy 3D image, and (d) atomic force microscopy image of $10\times 10$ μm 2 MgB 2 meander pattern with the line width of 135 nm and the space width of 165 nm. $I$--$V$ characteristics of $10\times 10$ μm 2 MgB 2 meander pattern with the line widths of (a) 225, (b) 180, and (c) 135 nm, measured at 4.2 K. Transient photoresponse of $10\times 10$ μm 2 MgB 2 meander pattern with the line width of 135 nm. The red dotted line shows the fitting of the recovery curve with the simple inductance-limited electrical model. The inset shows the bias current dependence of the number of detection signals vs mean photon number ($\mu$) at $\lambda = 1550$ nm.
ISSN:1882-0778
1882-0786
DOI:10.7567/APEX.6.023101