TiOxNy anti-resonant layer ARROW waveguides

• Published in: Physica status solidi. C Vol. 7; no. 3-4; pp. 960 - 963
• Main Authors: Carvalho, Daniel O., Albertin, Katia F., Alayo, Marco I.
• Format: Journal Article
• Language: English
• Published: Berlin WILEY-VCH Verlag 01.04.2010; WILEY‐VCH Verlag
• Subjects: 42.70.Ce; 42.79.Gn; 42.82.Cr; 42.82.Et; 78.66.Nk; 82.80.Yc; Noise levels; Optical properties; Reproduction; Rutherford backscattering spectroscopy; Solid state physics; Titanium dioxide; Wave propagation; Waveguides
• ISSN: 1862-6351; 1610-1642; 1610-1642
• DOI: 10.1002/pssc.200982878

ARROW waveguides with sputtered‐TiOxNy anti‐resonant layers obtained with different nitrogen concentration in the gaseous mixture were fabricated and characterized. A study of the influence of this parameter on the losses of the waveguides is presented in this work. TiOxNy films have very high refractive indexes, which is a very important characteristic for the first ARROW layer, since this layer behaves like a Fabry‐Perot resonator in anti‐resonance. Optical and compositional properties of the TiOxNy films were also studied and the results are presented. These films were characterized by Rutherford Backscattering Spectroscopy (RBS), FTIRs, optical absorption and ellipsometry. The second anti‐resonant layer and the core of the waveguides were composed of thermally grown SiO2 and PECVD‐SiOxNy, respectively. Optical characterization results show propagation losses as low as 1.18 dB/cm for single‐mode waveguides fabricated with TiOxNy films obtained with 25% of nitrogen in the gaseous mixture. (© WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)