CHx - porous silicon structures for gas sensing applications

We have developed a gas sensor for hydrocarbons using layered structures hydrocarbons/porous silicon. Sensitivity of this device, response time and capacitance response to different gases (ethane, ethylene and propane) have been studied. DC and AC electrical measurements were performed to test the s...

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Bibliographic Details
Published inPhysica status solidi. C Vol. 2; no. 9; pp. 3449 - 3452
Main Authors Gabouze, N., Belhousse, S., Cheraga, H.
Format Journal Article
LanguageEnglish
Published Berlin WILEY-VCH Verlag 01.06.2005
WILEY‐VCH Verlag
Subjects
07.07.Df
78.30.Ly
82.45.Mp
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Summary:We have developed a gas sensor for hydrocarbons using layered structures hydrocarbons/porous silicon. Sensitivity of this device, response time and capacitance response to different gases (ethane, ethylene and propane) have been studied. DC and AC electrical measurements were performed to test the sensor and it has been shown that CHx layer‐PS/p‐Si structure is modified by the gas reactivity on the PS/CHx surface. Finally, FTIR spectroscopy measurements in different gas environments have shown remarkable change of chemical composition of the sensor material as a result of its interaction with gases. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
Bibliography:ArticleID:PSSC200461217
ark:/67375/WNG-4R1RVTF0-D
istex:9029FD5C4F0FDC0C758A60EE8DF5DBC8734AA902
ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:1610-1634
1610-1642
DOI:10.1002/pssc.200461217