CHx - porous silicon structures for gas sensing applications
We have developed a gas sensor for hydrocarbons using layered structures hydrocarbons/porous silicon. Sensitivity of this device, response time and capacitance response to different gases (ethane, ethylene and propane) have been studied. DC and AC electrical measurements were performed to test the s...
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Published in | Physica status solidi. C Vol. 2; no. 9; pp. 3449 - 3452 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
Berlin
WILEY-VCH Verlag
01.06.2005
WILEY‐VCH Verlag |
Subjects | |
Online Access | Get full text |
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Summary: | We have developed a gas sensor for hydrocarbons using layered structures hydrocarbons/porous silicon. Sensitivity of this device, response time and capacitance response to different gases (ethane, ethylene and propane) have been studied. DC and AC electrical measurements were performed to test the sensor and it has been shown that CHx layer‐PS/p‐Si structure is modified by the gas reactivity on the PS/CHx surface. Finally, FTIR spectroscopy measurements in different gas environments have shown remarkable change of chemical composition of the sensor material as a result of its interaction with gases. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim) |
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Bibliography: | ArticleID:PSSC200461217 ark:/67375/WNG-4R1RVTF0-D istex:9029FD5C4F0FDC0C758A60EE8DF5DBC8734AA902 ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
ISSN: | 1610-1634 1610-1642 |
DOI: | 10.1002/pssc.200461217 |