Enhanced Carrier Transport in Uniaxially (001)-Oriented Anatase Ti0.94Nb0.06O2 Films Grown on Nanosheet Seed Layers

Uniaxially (001)-oriented anatase Ti 0.94 Nb 0.06 O 2 films were sputtered on a seed layer of glass covered with Ca 2 Nb 3 O 10 nanosheets (CNO-NS). The films had an effective electron mass of $0.7m_{0}$ ($m_{0}$ denotes the free electron mass), which was smaller than that of randomly oriented films...

Full description

Saved in:
Bibliographic Details
Published inApplied physics express Vol. 4; no. 4; pp. 045801 - 045801-3
Main Authors Yamada, Naoomi, Shibata, Tatsuo, Taira, Kenji, Hirose, Yasushi, Nakao, Shoichiro, Hoang, Ngoc Lam Huong, Hitosugi, Taro, Shimada, Toshihiro, Sasaki, Takayoshi, Hasegawa, Tetsuya
Format Journal Article
LanguageEnglish
Published The Japan Society of Applied Physics 01.04.2011
Online AccessGet full text

Cover

More Information
Summary:Uniaxially (001)-oriented anatase Ti 0.94 Nb 0.06 O 2 films were sputtered on a seed layer of glass covered with Ca 2 Nb 3 O 10 nanosheets (CNO-NS). The films had an effective electron mass of $0.7m_{0}$ ($m_{0}$ denotes the free electron mass), which was smaller than that of randomly oriented films, i.e., $0.9m_{0}$. The as-grown films exhibited a low resistivity of $7.6\times 10^{-4}$ $\Omega$ cm. Postdeposition annealing under H 2 atmosphere further reduced the resistivity to $4.0\times 10^{-4}$ $\Omega$ cm. This value is comparable with that of conventional transparent conducting oxides. Results indicate that sputtering using CNO-NS is promising for the fabrication of highly conductive Ti 1-x Nb x O 2 electrodes on glass.
Bibliography:Top panel: $\theta$--$2\theta$ XRD patterns of TNO grown on (a) CNO-NS/glass and (b) bare glass. Bottom panel: two-dimensional detector images ($2\theta = 10{\mbox{--}}45$°) of TNO grown on (c) CNO-NS/glass and (d) bare glass ($\chi$ is defined as the angle between the film surface and the diffractometer plane). Temperature dependence of (a) resistivity $\rho$, (b) carrier density $n_{\text{e}}$, and (c) Hall mobility $\mu_{\text{H}}$ of TNO in various films: (001)-oriented epitaxial film [(001)-epi], (001)-oriented film grown on CNS-NS [(001)-poly], and randomly oriented polycrystalline film (random-poly). (a) Optical transmittance ($T_{\text{r}}$) and reflectance ($R$) spectra for annealed TNO grown on CNO-NS/glass. (b) Results of Drude fitting (open circles: experimental values, solid lines: simulated curves).
ISSN:1882-0778
1882-0786
DOI:10.1143/APEX.4.045801