Evidence for non-mass-transfer mechanism in fs-laser formation of sub-200 nm structures on sapphire
Femtosecond-laser induced generation of sub-200 nm structures in Al 2 O 3 is reported. Comparison of experiment to theory favors periodical fluence variation while excluding self-organized mass transfer as responsible mechanism for structure formation.
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Published in | 2012 Conference on Lasers and Electro-Optics (CLEO) pp. 1 - 2 |
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Main Authors | , , , , |
Format | Conference Proceeding |
Language | English |
Published |
IEEE
01.05.2012
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Subjects | |
Online Access | Get full text |
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Summary: | Femtosecond-laser induced generation of sub-200 nm structures in Al 2 O 3 is reported. Comparison of experiment to theory favors periodical fluence variation while excluding self-organized mass transfer as responsible mechanism for structure formation. |
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ISBN: | 1467318396 9781467318396 |
ISSN: | 2160-8989 2160-9004 |
DOI: | 10.1364/CLEO_SI.2012.CM4K.4 |