APA (7th ed.) Citation

Matsubara, N., Windemuth, R., Mitsuru, H., & Atsushi, H. (2012, September). Plasma dicing technology. 2012 4th Electronic System-Integration Technology Conference, 1-5. https://doi.org/10.1109/ESTC.2012.6542178

Chicago Style (17th ed.) Citation

Matsubara, Noriyuki, Reinhard Windemuth, Hiroshima Mitsuru, and Harikai Atsushi. "Plasma Dicing Technology." 2012 4th Electronic System-Integration Technology Conference Sep. 2012: 1-5. https://doi.org/10.1109/ESTC.2012.6542178.

MLA (9th ed.) Citation

Matsubara, Noriyuki, et al. "Plasma Dicing Technology." 2012 4th Electronic System-Integration Technology Conference, Sep. 2012, pp. 1-5, https://doi.org/10.1109/ESTC.2012.6542178.