Enabling Chip-to-Substrate All-Cu Interconnections: Design of Engineered Bonding Interfaces for Improved Manufacturability and Low-Temperature Bonding
This paper presents the design and implementation of engineered nanoscale bonding interfaces as an effective strategy to improve manufacturability of Cu-Cu bonding to the level where it can, for the first time, be applied to chip-to-substrate (C2S) assembly. All-Cu interconnections are highly sought...
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Published in | 2017 IEEE 67th Electronic Components and Technology Conference (ECTC) pp. 968 - 975 |
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Main Authors | , , , , , , , , , |
Format | Conference Proceeding |
Language | English |
Published |
IEEE
01.05.2017
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Subjects | |
Online Access | Get full text |
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Summary: | This paper presents the design and implementation of engineered nanoscale bonding interfaces as an effective strategy to improve manufacturability of Cu-Cu bonding to the level where it can, for the first time, be applied to chip-to-substrate (C2S) assembly. All-Cu interconnections are highly sought after to meet the escalating electrical, thermal, and reliability requirements of a wide range of emerging digital and analog systems. Such applications require low-cost processes with bonding temperatures and pressures ideally below 200°C and 20MPa, respectively, far from existing solutions established in wafer-level packaging. GT-PRC and its industry partners address this technology gap through innovative designs of bonding interfaces, introducing: 1) novel ultra-thin surface finish metallurgies applied on Cu bumps and pads to prevent oxidation and achieve low-temperature assembly, 2) low-cost fly-cut planarization technique to lower bonding pressures, and 3) low-modulus nanocopper foam caps to provide tolerance to non-coplanarities, and further reduce bonding temperatures and pressures. |
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ISSN: | 2377-5726 |
DOI: | 10.1109/ECTC.2017.313 |