Design, fabrication and characterization of compact force sensor using AT-cut quartz crystal resonators

A compact force sensor with the AT-cut quartz crystal resonator was developed. The quartz crystal resonator has the characteristic that the resonance frequency changes by the external force, which achieves high sensitivity, high-speed response, and wide range of measurement by a simple structure. Al...

Full description

Saved in:
Bibliographic Details
Published in2008 IEEE/RSJ International Conference on Intelligent Robots and Systems pp. 506 - 511
Main Authors Asakura, A., Fukuda, T., Arai, F.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.09.2008
Subjects
Crystals
Force
Force sensors
Resonant frequency
Stress
Temperature measurement
Temperature sensors
Online AccessGet full text

Cover

More Information
Summary:A compact force sensor with the AT-cut quartz crystal resonator was developed. The quartz crystal resonator has the characteristic that the resonance frequency changes by the external force, which achieves high sensitivity, high-speed response, and wide range of measurement by a simple structure. Also it has the superior feature in the temperature and frequency stability. In the past, the quartz crystal resonator had been hardly applied to the force measurement because of low degree of mechanical characteristic, that is, it is weak to stress concentration by bending. The objective of this study is to construct the sensor mechanism that safely maintains the quartz crystal resonator for the external force with flat structure. We designed and analyzed a novel retention mechanism of the quartz crystal resonator. The proposed force sensor is flat, small, and sensitive. It can be applied to several usages such as medical treatment and contact force detection of human.
ISBN:9781424420575
1424420571
ISSN:2153-0858
2153-0866
DOI:10.1109/IROS.2008.4650925