Bulk-acoustic-wave filters: performance optimization and volume manufacturing

Performance parameters of BAW devices are reviewed and ranked corresponding to their importance for RF-filters in mobile phone applications. The most important performance parameters - such as resonator bandwidth and Q-values - critically depend on the quality of the piezolayer and other relevant la...

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Bibliographic Details
Published inIEEE MTT-S International Microwave Symposium Digest, 2003 Vol. 3; pp. 2001 - 2004 vol.3
Main Authors Aigner, R., Kaitila, J., Ella, J., Elbrecht, L., Nessler, W., Handtmann, M., Herzog, T.-R., Marksteiner, S.
Format Conference Proceeding
LanguageEnglish
Published IEEE 2003
Subjects
Bandwidth
Bulk acoustic wave devices
Frequency
GSM
Manufacturing
Mobile handsets
Multiaccess communication
Preamplifiers
Resonator filters
SAW filters
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Summary:Performance parameters of BAW devices are reviewed and ranked corresponding to their importance for RF-filters in mobile phone applications. The most important performance parameters - such as resonator bandwidth and Q-values - critically depend on the quality of the piezolayer and other relevant layers in the acoustic stack. The design of the complete layer stack in a Solidly Mounted Resonator (SMR) concept in combination with a proper design of lateral resonator-boundaries will be revealed to be extremely important for the suppression of spurious resonances. Challenges in manufacturing of BAW filters will be briefly reviewed. Examples of state-of-the-art in BAW filters in production and ramp-up status will be presented.
ISBN:9780780376953
0780376951
ISSN:0149-645X
2576-7216
DOI:10.1109/MWSYM.2003.1210552