A Low-Profile Three-Dimensional Silicon/Parylene Stimulating Electrode Array for Neural Prosthesis Applications

This paper describes a low-profile three-dimensional silicon/parylene microelectrode array as basis for practical neural prostheses for use in the central nervous system. The circuit areas of the silicon probes, containing mixed-signal CMOS circuitry for neural stimulation/recording, can be folded o...

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Published in2005 IEEE Engineering in Medicine and Biology 27th Annual Conference Vol. 2005; pp. 1293 - 1296
Main Authors Yao, Y., Gulari, M.N., Ghimire, S., Hetke, J.F., Wise, K.D.
Format Conference Proceeding Journal Article
LanguageEnglish
Published United States IEEE 2005
Subjects
Assembly
Circuits
Dielectric substrates
Electrodes
Etching
Implants
Microelectrodes
Probes
Prosthetics
Silicon
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Summary:This paper describes a low-profile three-dimensional silicon/parylene microelectrode array as basis for practical neural prostheses for use in the central nervous system. The circuit areas of the silicon probes, containing mixed-signal CMOS circuitry for neural stimulation/recording, can be folded over to reduce the overall height of the microassembled array above the cortical surface. The low-profile structure is implemented using multiple gold beams spaced by orthogonal silicon braces. An integrated silicon/parylene batch process is introduced to encapsulate these interconnects and achieve high yield
Bibliography:ObjectType-Article-1
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ISBN:0780387414
9780780387416
ISSN:1094-687X
1557-170X
1558-4615
DOI:10.1109/IEMBS.2005.1616663