Damage, refractive index and near-field intensity profiles in a single-mode waveguide of LiNbO3 by 400 keV He ion implantation

• Published in: Journal of physics. D, Applied physics Vol. 43; no. 45; p. 455303
• Main Authors: Zhang, S M, Liu, X H, Qin, X F, Wang, K M, Liu, X
• Format: Journal Article
• Language: English
• Published: Bristol IOP Publishing 17.11.2010; Institute of Physics
• Subjects: Backscattering; Cold working, work hardening; annealing, quenching, tempering, recovery, and recrystallization; textures; Condensed matter: electronic structure, electrical, magnetic, and optical properties; Cross-disciplinary physics: materials science; rheology; Damage; Exact sciences and technology; Ion implantation; Materials science; Optical constants: refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity; Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation; Optical properties of bulk materials and thin films; Physics; Refractive index; Refractivity; Spectra; Treatment of materials and its effects on microstructure and properties; Wave propagation; Waveguides; Ion implantation; RBS; Annealing; Channeling; Doses; Refractive index; Cryogenic temperature; Calculation methods; Ridge waveguides; Optical properties; Lithium niobates; Waveguides; Damage
• ISSN: 0022-3727; 1361-6463
• DOI: 10.1088/0022-3727/43/45/455303

We report on a single-mode waveguide in lithium niobate produced by 400 keV He ion implantation with a dose of 3 X 1016 ions cm-2 at liquid nitrogen temperature. Rutherford backscattering/channelling spectra have been measured in the waveguide before and after annealing and the damage profile has been extracted. The shape of the measured damage profile is similar to that of the ordinary refractive index by the intensity calculation method. The near-field intensity profile in a ridge waveguide is given and the propagation loss for the extraordinary index is estimated to be 1.9 dB cm-1.