Structure and phase composition study of thin TiO2:C films deposited by r.f. magnetron sputtering

Thin films of TiO2 doped with carbon were deposited on 15×25×1 mm3 glass substrates by r.f. magnetron co-sputtering of TiO2 target and carbon plates on their erosion zone in Ar + air atmosphere (0.5 Pa and 0.6 Pa, respectively). Two different process parameters were varied in different experiments:...

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Bibliographic Details
Published inJournal of physics. Conference series Vol. 2240; no. 1; pp. 012009 - 12015
Main Authors Milenov, T, Karaivanova, D, Angelov, O, Terziyska, P, Avdeev, G, Karashanova, D, Georgieva, B, Genkov, K, Dimov, D, Ivanov, K, Kolev, S, Valcheva, E
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.03.2022
Subjects
Anatase
Annealing
Brookite
Carbon
Ellipsometry
Glass substrates
Magnetron sputtering
Nanocrystals
Phase composition
Phases
Physics
Plates
Process parameters
Raman spectroscopy
Rutile
Thickness
Thin films
Titanium dioxide
Titanium oxides
Transmission electron microscopy
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Summary:Thin films of TiO2 doped with carbon were deposited on 15×25×1 mm3 glass substrates by r.f. magnetron co-sputtering of TiO2 target and carbon plates on their erosion zone in Ar + air atmosphere (0.5 Pa and 0.6 Pa, respectively). Two different process parameters were varied in different experiments: the total area of the carbon plates (84 mm2, 560 mm2, 830 mm2 or 1480 mm2) and the radial distance from the center of the circle of the erosion zone with maximum rate of sputtering (2 cm or 4 cm). The as-deposited and annealed (air, 400 °C, 1 h) thin films with thicknesses of 40 - 60 nm were studied by ellipsometry, grazing incidence X-ray diffractometry (GIXRD), Raman spectroscopy, transmission (TEM) and scanning electron microscopies (SEM). The ellipsometric studies revealed the band gap, as well as the tail states and optical constants of the thin films obtained. The GIXRD patterns revealed a mix of amorphous and nanocrystalline anatase and rutile TiO2 phases in all thin films. The Raman study confirmed this conclusion, but the TEM study showed the presence of some nanocrystalline C20O14Ti3, together with the other TiO2 phases - brookite and nonstoichiometric TiOx phases (anatase and rutile). The effects of annealing at 400 °C in air for 60 min are also discussed.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/2240/1/012009