Development of analytical models of T- and U-shaped cantilever-based MEMS devices for sensing and energy harvesting applications

Dynamic-mode cantilever-based structures supporting end masses are frequently used as MEMS/NEMS devices in application areas as diverse as chemical/biosensing, atomic force microscopy, and energy harvesting. This paper presents a new analytical solution for the free vibration of a cantilever with a...

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Bibliographic Details
Published inIEEE SENSORS 2014 Proceedings pp. 1648 - 1651
Main Authors Heinrich, S. M., Boudjiet, M. T., Thuau, D., Poulin, P., Ayela, C., Dufour, I.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.11.2014
Subjects
analytical model
Analytical models
end mass
Frequency measurement
Geometry
Micromechanical devices
natural frequency
resonant frequency
Silicon
T-shaped cantilever
Three-dimensional displays
U-shaped cantilever
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Summary:Dynamic-mode cantilever-based structures supporting end masses are frequently used as MEMS/NEMS devices in application areas as diverse as chemical/biosensing, atomic force microscopy, and energy harvesting. This paper presents a new analytical solution for the free vibration of a cantilever with a rigid end mass of finite size. The effects of both translational and rotational inertia as well as horizontal eccentricity of the end mass are incorporated into the model. This model is general regarding the end-mass distribution/geometry and is validated here for the commonly encountered geometries of T- and U-shaped cantilevers. Comparisons with 3D FEA simulations and experiments on silicon and organic MEMS are quite encouraging. The new solution gives insight into device behavior, provides an efficient tool for preliminary design, and may be extended in a straightforward manner to account for inherent energy dissipation in the case of organic-based cantilevers.
ISSN:1930-0395
2168-9229
DOI:10.1109/ICSENS.2014.6985336