An array of 100 Al–Al2O3–Cu SIN tunnel junctions in direct-write trilayer technology
We present superconductor-insulator-normal metal (SIN) tunnel junction thermometers made of arrays of 4-100 Al-Al2O3-Cu SIN tunnel junctions fabricated in direct-write technology. The technology is based on in situ evaporation of the superconductive electrode followed by the oxidation and the normal...
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| Published in | Superconductor science & technology Vol. 20; no. 12; pp. 1155 - 1158 |
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| Main Authors | , , , , |
| Format | Journal Article |
| Language | English |
| Published |
IOP Publishing
01.12.2007
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| Online Access | Get full text |
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| Abstract | We present superconductor-insulator-normal metal (SIN) tunnel junction thermometers made of arrays of 4-100 Al-Al2O3-Cu SIN tunnel junctions fabricated in direct-write technology. The technology is based on in situ evaporation of the superconductive electrode followed by the oxidation and the normal counter-electrode as a first step and deposition of normal metal absorber as a second one. |
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| AbstractList | We present superconductor-insulator-normal metal (SIN) tunnel junction thermometers made of arrays of 4-100 Al-Al2O3-Cu SIN tunnel junctions fabricated in direct-write technology. The technology is based on in situ evaporation of the superconductive electrode followed by the oxidation and the normal counter-electrode as a first step and deposition of normal metal absorber as a second one. |
| Author | Otto, Ernst Gustavsson, David Kuzmin, Leonid Pettersson, Gustav Tarasov, Mikhail |
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| Title | An array of 100 Al–Al2O3–Cu SIN tunnel junctions in direct-write trilayer technology |
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