An array of 100 Al–Al2O3–Cu SIN tunnel junctions in direct-write trilayer technology

We present superconductor-insulator-normal metal (SIN) tunnel junction thermometers made of arrays of 4-100 Al-Al2O3-Cu SIN tunnel junctions fabricated in direct-write technology. The technology is based on in situ evaporation of the superconductive electrode followed by the oxidation and the normal...

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Bibliographic Details
Published inSuperconductor science & technology Vol. 20; no. 12; pp. 1155 - 1158
Main Authors Otto, Ernst, Tarasov, Mikhail, Pettersson, Gustav, Gustavsson, David, Kuzmin, Leonid
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.12.2007
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Summary:We present superconductor-insulator-normal metal (SIN) tunnel junction thermometers made of arrays of 4-100 Al-Al2O3-Cu SIN tunnel junctions fabricated in direct-write technology. The technology is based on in situ evaporation of the superconductive electrode followed by the oxidation and the normal counter-electrode as a first step and deposition of normal metal absorber as a second one.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
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ISSN:0953-2048
1361-6668
DOI:10.1088/0953-2048/20/12/012