Fabrication of photonic crystal slabs and defects using laser interference lithography and focused ion beam-assisted deposition

A method is described for fabricating photonic crystal slabs, using a combination of laser interference lithography for generating a regular periodic structure (the crystal lattice), and focused ion beam-assisted deposition for defining defects in this lattice, which may act as waveguides or resonat...

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Bibliographic Details
Published inProceedings of 2002 4th International Conference on Transparent Optical Networks (IEEE Cat. No.02EX551) Vol. 2; pp. 14 - 19 vol.2
Main Authors de Ridder, R.M., Bostan, C.G., van Wolferen, H.A.G.M., van Dorssen, I., Vogelaar, L., Segerink, F.B., Kuipers, L., van Hulst, N.F.
Format Conference Proceeding
LanguageEnglish
Published IEEE 2002
Subjects
Holographic optical components
Holography
Interference
Lithography
Optical device fabrication
Optical refraction
Optical resonators
Optical waveguides
Photonic crystals
Slabs
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Summary:A method is described for fabricating photonic crystal slabs, using a combination of laser interference lithography for generating a regular periodic structure (the crystal lattice), and focused ion beam-assisted deposition for defining defects in this lattice, which may act as waveguides or resonators. As an example, results will be shown of a photonic crystal slab with a line defect in silicon nitride.
ISBN:0780373758
9780780373754
DOI:10.1109/ICTON.2002.1007836