Sub-nanometer stepping drive of surface acoustic wave motor

Ranging down to sub-nanometer stepping drives of a surface acoustic wave (SAW) motor is reported. The SAW motor demonstrated the high-resolution motion along with quick positioning ability, 0.2 milliseconds interval in this report, over centimeter-level long stroke. The step size was easily changed,...

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Bibliographic Details
Published in2003 Third IEEE Conference on Nanotechnology, 2003. IEEE-NANO 2003 Vol. 1; pp. 299 - 302 vol.2
Main Authors Shigematsu, T., Kurosawa, M.K., Asai, K.
Format Conference Proceeding
LanguageEnglish
Published IEEE 2003
Subjects
Acoustic waves
Actuators
Radio frequency
Rails
Silicon
Stators
Steel
Surface acoustic wave devices
Surface acoustic waves
Vibrations
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Summary:Ranging down to sub-nanometer stepping drives of a surface acoustic wave (SAW) motor is reported. The SAW motor demonstrated the high-resolution motion along with quick positioning ability, 0.2 milliseconds interval in this report, over centimeter-level long stroke. The step size was easily changed, by a number of driving waves, from sub-nanometer to several hundred nanometers in which the step period was 0.2 ms. We investigated the motion resolution in relation to driving conditions. Appropriately adjusting the driving condition according to the investigation result, 0.5 nm stepping motions were achieved. The improvement of the resolution enhanced the actuator performance for precise positioning.
ISBN:0780379764
9780780379763
DOI:10.1109/NANO.2003.1231777