Characterization of nonlinear behavior in a tunable phase shifter using ferroelectric PZT thin-film capacitors and its effect on system performance

In this paper, the nonlinear behavior in a tunable phase shifter using ferroelectric lead zirconate titanate (PZT) thin-film capacitors is described. The phase shifter is of reflection-type consisting of a coplanar waveguide Lange coupler and two ferroelectric PZT varactors on high resistivity silic...

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Bibliographic Details
Published in2009 IEEE MTT-S International Microwave Symposium Digest pp. 341 - 344
Main Authors Qiu, J.X., Judy, D.C., Pulskamp, J.S., Polcawich, R.G., Kaul, R., Crowne, F.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.06.2009
Subjects
Capacitors
Conductivity
Coplanar waveguides
EVM
Ferroelectric materials
Ferroelectric thin-film
intermodulation
nonlinear distortion
Phase shifters
PZT
QAM
Silicon
System performance
Titanium compounds
Transistors
tunable phase shifter
Varactors
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Summary:In this paper, the nonlinear behavior in a tunable phase shifter using ferroelectric lead zirconate titanate (PZT) thin-film capacitors is described. The phase shifter is of reflection-type consisting of a coplanar waveguide Lange coupler and two ferroelectric PZT varactors on high resistivity silicon substrate. The nonlinearity is characterized by measuring the AM/AM and AM/PM transfer curves of the device, a technique that is commonly used to characterize power amplifiers. The responses of the device to two-tone and quadrature-amplitude-modulation waveforms are then estimated according to the measured transfer curves.
ISBN:1424428033
9781424428038
ISSN:0149-645X
2576-7216
DOI:10.1109/MWSYM.2009.5165703