Electrostatically transduced face-shear mode silicon MEMS microresonator

Silicon microresonators are increasingly viewed as attractive candidates for a variety of frequency selective signal processing applications due to miniaturization and potential for integration with CMOS. In this work, we present a new electrostatically transduced face-shear (FS) mode square plate s...

Full description

Saved in:
Bibliographic Details
Published in2010 IEEE International Frequency Control Symposium pp. 534 - 538
Main Authors Lin, Angel T.-H, Jize Yan, Seshia, Ashwin A
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.06.2010
Subjects
Electrodes
Frequency measurement
Resonant frequency
Shape
Silicon
Temperature measurement
Temperature sensors
Online AccessGet full text

Cover

More Information
Summary:Silicon microresonators are increasingly viewed as attractive candidates for a variety of frequency selective signal processing applications due to miniaturization and potential for integration with CMOS. In this work, we present a new electrostatically transduced face-shear (FS) mode square plate single crystal silicon resonator that rivals previously reported bulk mode resonator topologies and demonstrates good frequency scaling. A microfabricated face-shear mode resonator with 800 μm side length demonstrates a resonant frequency of 3.638 MHz, Q of 11193 in air and 836283 in vacuum as well as a TCF of -19ppm/K.
ISBN:1424463998
9781424463992
ISSN:2327-1914
DOI:10.1109/FREQ.2010.5556271