Suppression of transverse-mode spurious responses for saw resonators on SiO2/Al/LiNbO3 structure by selective removal of SiO2

• Published in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control Vol. 58; no. 10; pp. 2188 - 2193
• Main Authors: Nakamura, H., Nakanishi, H., Goto, R., Hashimoto, K.
• Format: Journal Article
• Language: English
• Published: New York, NY IEEE 01.10.2011; Institute of Electrical and Electronics Engineers; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Acoustic wave devices, piezoelectric and piezoresistive devices; Acoustics; Applied sciences; Electrodes; Electronics; Exact sciences and technology; Fundamental areas of phenomenology (including applications); Physics; Resonator filters; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Substrates; Surface acoustic waves; Telecommunications systems; Temperature; Transduction; acoustical devices for the generation and reproduction of sound; Mode coupling; Transverse mode; Duplexer; Interdigital transducer; Acoustic surface waves; Surface wave; Electromechanical coupling; Surface acoustic wave resonators; Temperature coefficient; Silicon oxides; Lithium niobates; Coupled modes; Coupling factor; Radio communication
• ISSN: 0885-3010; 1525-8955
• DOI: 10.1109/TUFFC.2011.2068

A SiO 2 /Al/LiNbO 3 structure has a large electromechanical coupling factor (K 2 ) and good temperature coefficient of frequency (TCF) for applications as a SAW duplexer of the Universal Mobile Telecommunications System (UMTS) Band I. However, the SiO 2 /Al/LiNbO 3 structure also supports two unwanted spurious responses; one is caused by the Rayleigh mode and the other by the transverse mode. As the authors have previously discussed, the Rayleigh-mode spurious response can be suppressed by controlling the cross-sectional shape of a SiO 2 overlay deposited on resonator electrodes. In this paper, a new technique to suppress the transverse-mode spurious responses is proposed. In the technique, the SiO 2 overlay is selectively removed from the dummy electrode region. The spurious responses are analyzed by the laser probe system. The results indicate that the spurious responses in question were hybrid modes caused by the coupling between the main (SH) SAW and another (Rayleigh) SAW with different velocities. The hybrid-mode spurious behavior was dependent on the velocities in the IDT and the dummy regions (v i and v d ). The hybrid-mode spurious responses could be suppressed by selectively removing SiO 2 . Furthermore, the SAW energy confinement could be enhanced in the IDT electrode region when v i <; v d . The transverse-mode spurious responses were successfully suppressed without degrading the SAW resonator performances.