New technique for fabrication of high frequency piezoelectric Micromachined Ultrasound Transducers

A novel technique for fabrication of linear arrays of high frequency piezoelectric Micromachined Ultrasound Transducers (pMUT) on silicon substrates is presented. Piezoelectric elements are formed by deposition of PZT ((PbZr x Ti 1-x )O 3 ) into etched features of the silicon substrate such that the...

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Bibliographic Details
Published in2008 IEEE Ultrasonics Symposium pp. 2115 - 2118
Main Authors Pedersen, T., Thomsen, E.V., Zawada, T., Hansen, K., Lou-Moeller, R.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.11.2008
Subjects
Electrodes
Etching
Fabrication
Piezoelectric transducers
pMUT
PZT
Resonance
Resonant frequency
Silicon
thick film
Ultrasonic imaging
Ultrasonic transducer arrays
Ultrasonic transducers
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Summary:A novel technique for fabrication of linear arrays of high frequency piezoelectric Micromachined Ultrasound Transducers (pMUT) on silicon substrates is presented. Piezoelectric elements are formed by deposition of PZT ((PbZr x Ti 1-x )O 3 ) into etched features of the silicon substrate such that the depth of these features determine the element thickness and hence the resonance frequency. The process leaves a near planar surface which is ideal for further wafer level processing such as top electrode and interconnect formation. A fabricated single element is characterized by pulse echo response.
ISBN:1424424283
9781424424283
ISSN:1051-0117
DOI:10.1109/ULTSYM.2008.0523